Dr. Andy Y.D. Tsen CI M Technical Manager, Advanced ENG-CIM Program, TSMC 2010 2007 TSMC, Ltd P. 1 2007 P. 1 Mar. TSMC Property 2010 2007 TSMC, Ltd P. 2 2007 P. 2 Mar. TSMC Property
(IDM)IDM) , TSMC Property TI, Intel TI, Intel TI, Intel nVidia 2010 2007 TSMC, Ltd P. 3 2007 P. 3 Mar. , TSMC Property ( ), 2006 (IC ) 20% 1998 73 2006 423 ( 6 ) 1,091 2,1 10 ( 93% ) 2007
2010 2007 TSMC, Ltd P. 4 2007 P. 4 Mar. ( Wi-Fi) ( PDA)) ( iPod) ) (PS3, X-BOX, Wii..) DVD RFID, : IC Insights 50% 06 Source: IC insights, WSTS, TSMC 2010 2007 TSMC, Ltd P. 5 2007 P. 5 Mar. TSMC Property 2006 (IDM) 2006 ) TSMC Property
: IC Insights & (1997 ) 2010 2007 TSMC, Ltd 2006 3,174 1,270 P. 6 2007 P. 6 Mar. WaferTech Fab 2, 3, 5, 8, 12 (IDM) ) Fab 6 ,14 SSMC 2010 2007 TSMC, Ltd P. 7 2007 P. 7 Mar. TSMC Property
Fab 2 (IDM) ) Fab 6(IDM) ) TSMC (IDM) ) 2010 2007 TSMC, Ltd P. 8 2007 P. 8 Mar. TSMC Property Fab 5 (IDM) ) Fab 3(IDM) ) Fab 8(IDM) ) WaferTech (IDM) ) Fab 12(IDM) ) Fab 14(IDM) ) SSMC (IDM) ) TSMC Property (1) (2) (3)
2010 2007 TSMC, Ltd P. 9 2007 P. 9 Mar. 2010 2007 TSMC, Ltd P. 102007 P. 10 Mar. TSMC Property TSMC Property 500 , 370 (~2006 ) (~2006 ) 12 Data Centers
2010 2007 TSMC, Ltd P. 112007 P. 11 Mar. 400 Unix Servers & 1,500 PC Servers 250 TB DB Storage 65,000 Network Ports 20,000 Desktop & Laptop PCs TSMC Property (BKM, BKM, Best Known Method) 2010 2007 TSMC, Ltd P. 122007 P. 12
Mar. TSMC Property 2010 2007 TSMC, Ltd P. 132007 P. 13 Mar. End-to-End TSMC Property eFoundrySM Virtual Fab E2E IC Customer Sales & Services Design, R&D, Manufacturing Logistics & Finance Enterprise Planning Workforce Management & Control
2010 2007 TSMC, Ltd P. 142007 P. 14 Mar. Sales Planning FIN Audit HR Logistics Supplier Customer Sales Offices Account Manager Customer Engagement Supply Chain Planning CASD Collaborated Transaction Head Quarter Customer Support Marketing, R&D
Demand Planning Pricing & Quotation PAR Field Tech Support Order Taking & Fulfillment Shipping & Billing Credit Order/Lot Invoice CCDR IT Technology Supply Chain Management Demand Planning Allocation Planning Capacity Modeling ATP, MPS i2/Java/VB Price and Quotation Price Guide, Price Adjustment Quotation ASP Forecast Customer Relationship Management 2010 2007 TSMC, Ltd
P. 152007 P. 15 Mar. TSMC Property SDCR Corp. Finance Production Accou Quality Accou Pricing Planning nting nting Capability Order Entry / Fulfillment Credit Management Order Release Customer Claim/Issues/Feedback SDCR, RMA Customer Data Management Supplier Enterprise Workforce Planning Management & Control Customer Complaint & Sales Return System Order Management Sales Design, Logistics & Services R&D, & Finance Manufacturing Customer Satisfaction Management
Feedback Customer Service CASD - Capacity Allocation Supported Demand PAR - Price Adjustment Request CCDR - Customer Claim Description Report SDCR - Sales Debit/Credite Requisition ATP - Available To Promise MPS - Master Production Schedule RMA - Return Material Authorization Customer Sales Design, Logistics & Services R&D, & Finance Manufacturing Enterprise Workforce TSMC Planning Management & Control Supplier Property ERP SAP configuration (IDM)Cross-country,inter-company) (IDM)Split & M erge) 15 Procurement
Materials Planning Budget Authorization Backend Outsourcing Goods Receiving & Quality Inspection Inventory Management Asset Management SAP Booking Work Order Wafer Start Purchase Order Regional Sales Office (IDM)NA, 2010 2007 TSMC, Ltd Japan, Europe, P. 162007 P. 16 Mar. Asia, China) Cash Management Backend
Wafe r Suppliers Payment TSMC-HQ TSMC-HQ Circuit Probe (IDM) ) Color Filter/Bumping JV Order Affiliated Fab (IDM)WT, SSMC, SH) Assembly & Final Test Customer Sales Design, Logistics & Services R&D, & Finance Manufacturing TSMC Property Workforce Enterprise Planning Management & Control (IDM)ABC, Standard Cost) (IDM)Data) (IDM)BI) Demand/
Allocation Planning Capacity Planning Planning Business Analysis Systems Budget Planning Forecast Rolling Forecast Cost Management Closing & Financial Analysis Logistics & Finance Pricing Analysis Data Warehouse Financial Analysis Audit 2010 2007 TSMC, Ltd P. 172007 P. 17 Mar. ETL Tool/Multi-Dimention DB/Data Mining/ BO/SAP-BW Supplier
Control & Audit Customer Sales Design, Logistics & Services R&D, & Finance Manufacturing Supplier TSMC Property Workforce Enterprise Planning Management & Control PeopleSoft e-HR Headcount Planning Talent Sourcing Recruitment Organization Management Performance Evaluation Workforce Development PeopleSoft/e-HR
Compensation & Payroll Separation Package/Java/ASP Employee Relationship Management 2010 2007 TSMC, Ltd P. 182007 P. 18 Mar. HR Management Self Service 1400+ organization 350K self service access 500K job changes/year 28K training courses Systems include Personnel Administration, Recruitment, Training, Global Assignment, Payroll, Benefits, Bonus, etc. 23K eLearning sessions/ month Systems include eLearning, eR eferral, eRecruiting, ePMD, Sala ry Review, Insurance, Pay slip, Personnel Profile, eAssignment, eTransfer Customer Sales Design, Logistics & Services R&D, & Finance
Manufacturing TSMC Property Workforce Enterprise Planning Management & Control MyTSMC Portal eMail , Electronic Workflow 2010 2007 TSMC, Ltd P. 192007 P. 19 Mar. Customer Sales Design, Logistics & Services R&D, & Finance Manufacturing TSMC Property Enterprise Workforce Planning Management
& Control (BKM, designers, engineers, pl anners, foundry managers, etc.) B2B Web Design Collaboration Time-to-market DocuFastTM TSMC-eJobViewTM B2Bi Remote Mask Database Check Order Management TSMC-Online Engineering Collaboration Time-to-volume CyberShuttleTM Engineering Data Analysis 2010 2007 TSMC, Ltd P. 202007 P. 20 Mar. Logistics Collaboration Time-to-delivery Integrated WIP Management Proactive Reporting Service Customer Lot Management
Logistics & Engineering Order Management for supplier Backend WIP Management Invoice Supplier B2Bi Supply-Online / TSMC Property 2010 2007 TSMC, Ltd P. 212007 P. 21 Mar. TSMC Property
End to End Integrated 300mm IT Solution Order/new tech. Management Planning Shipping Manufacturing Dispatching MES Fill in order MCS AMHS EDA Reporting EQ Supply Chain/ Manu. Planning Outgoing /Invoice Equip Auto. Process control (IDM)APC/AEC) MES Manufacturing Executing System 2010 2007 TSMC, Ltd Mar. 2007 MCS & AMHS Transportation, EDA:Engineering Data Analysis,
APC Advanced Process Control, FDC Fault Detection & Classification , , 97% TSMC Property Intra-bay with Merge/Diverge Function FOUP Stocker AMHS , Giga Fab 2010 2007 TSMC, Ltd P. 232007 P. 23 Mar. Inter-bay Transportation F12/F14 97% Intra-bay Load FOUP to L/P Challenges Different commercial packages, customized packages and in-house development syste ms IT techniques Unified with standardization (IDM)Networking, Database, Architecture) Planning Accuracy 1.Support super hot run 2.Lower cycle time 3.Delivery schedule accuracy Tool productivity & Overall Capacity Utilizati on 1.Capacity optimization (IDM)12 Fab investment ~= NT$100B) 2.Inter-Fab backup / Overall capacity as a sin
gle pool Dynamic dispatching algorithm /Finite capacity algorithm (IDM)C/C++, SQL, Web, Java, Framewor k, Corba) Tool control/ Advanced planning sy stem Integration (IDM)C/C++, VB, Intranet, Web, Java, S ECS*, Framework, Corba) *SECS : (Semiconductor Equipment Communication Standard)Semiconductor Equipment Communication Standard) 2010 2007 TSMC, Ltd P. 242007 P. 24 Mar. TSMC Property TSMC Property Die/Transistor Level 105X Within Wafer Within Field 103X Wafer to Wafer 102X Lot to Lot Data volume Data Volume
(IDM)6 812), (IDM) ), (IDM)1 inch2: 100 M ) , IT , , X 0.13um 90nm 65/55nm 45/32nm Technology Node For the Precise Process Control, Data Volume will Grow Exponentially 2010 2007 TSMC, Ltd P. 252007 P. 25 Mar. APC/FDC TSMC Property IT , (IDM)EDA*) , APC FDC, , know-how Mean to the target FAB-wide APC Yield/Device Characteristics Oriented Tighten variation 2 variance reduction FDC
Fault Detection & Classification, customer require original dist. APC Advanced Process Control, 1 Thin Film 2010 2007 TSMC, Ltd P. 262007 P. 26 Mar. CMP PHOTO ETCH WAT based-line improvement High Speed (BKM, Idsat) Cycle time EDA - Engineering Data Analysis, APC Advanced Process Control, FDC Fault Detection & Classification , Challenges
IT techniques Data mart/warehouse/ Huge data amount and data management Precise process control 1.Reduce process variation 2.Precise equipment monitoring 3.Long yield ramping time 2010 2007 TSMC, Ltd P. 272007 P. 27 Mar. Data Mining (IDM)C/C++, SQL, Intranet, Web, Networking, Java) Process Modeling/Simulation Process Control/Equipment Control /Design for Manufacturing (IDM)C/C++, VB, .NET, matlab, Security, Int ranet, Corba, Framework, Integration) TSMC Property (IDM) / / ) TSMC Property Partner
Customer / TSMC / 2010 2007 TSMC, Ltd P. 282007 P. 28
Mar. *AMHS:Automatic Material Handling System 2010 2007 TSMC, Ltd P. 292007 P. 29 Mar. TSMC Property (IDM)1/2) 2006 1 2 3 4 5
6 7 8 9 10 : 2010 2007 TSMC, Ltd P. 302007 P. 30 Mar. TSMC Property 2006 40.1%. (NT $)) 2004 2005 2006 923
932 1,270 1995-2006 10 2006 : 96.2 (IDM)2/2) 2006 1 469 2 431 3 257 4
186 5 115 6 167 7 109 8 106 9 105 10 100 : 2010 2007 TSMC, Ltd P. 312007 P. 31
Mar. 00 ITRS 130 Technology Generation (IDM)nm) 2006 , 469 TSMC Property 01 ITRS 90 65 05 ITRS 45 TSMC 32 00 02 04 06 08 10 12
ITRS: International Technology Roadmap for Semiconductors 2010 2007 TSMC, Ltd P. 322007 P. 32 Mar. TSMC Property
- 2010 2007 TSMC, Ltd P. 332007 P. 33 Mar. ICIC (Semiconductor Equipment Communication Standard)Integrity) (Semiconductor Equipment Communication Standard)Customer Orientation) (Semiconductor Equipment Communication Standard)Innovation) (Semiconductor Equipment Communication Standard)Commitment) TSMC Property TSMC Property Thank you 2010 2007 TSMC, Ltd P. 342007 P. 34 Mar.
